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Application-specific system technology
Pneumatic drive for a vacuum valve with integrated sequence control
Product information
Pneumatic drive for a vacuum valve with integrated sequence control
This actuator is used to control a valve in vacuum technology, which is primarily used in semiconductor and data storage technology. The compact rotary actuator enables rotation angles of up to 53° and is reset by a spring. It has an integrated optical position indicator and is equipped with control valves for two different movement sequences.
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